Electromagnetic microrelays: concepts and fundamental characteristics

Hiroshi Hosaka; Hiroki Kuwano; Keiichi Yanagisawa

Electromagnetic microrelays: concepts and fundamental characteristics

Hiroshi Hosaka, Hiroki Kuwano, Keiichi Yanagisawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm³ at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.

Original language	English
Title of host publication	IEEE Micro Electro Mechanical Systems
Publisher	Publ by IEEE
Pages	12-17
Number of pages	6
ISBN (Print)	0780309588
Publication status	Published - 1993 Jan 1
Externally published	Yes
Event	Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA Duration: 1993 Feb 7 → 1993 Feb 10

Publication series

Name	IEEE Micro Electro Mechanical Systems

Other

Other	Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
City	Fort Lauderdale, FL, USA
Period	93/2/7 → 93/2/10

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Electromagnetic microrelays: concepts and fundamental characteristics",

abstract = "An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm3 at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.",

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N2 - An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm3 at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.

AB - An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm3 at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.

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