Electromagnetic microrelays: concepts and fundamental characteristics

Hiroshi Hosaka, Hiroki Kuwano, Keiichi Yanagisawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

47 Citations (Scopus)

Abstract

An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm3 at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.

Original languageEnglish
Title of host publicationIEEE Micro Electro Mechanical Systems
PublisherPubl by IEEE
Pages12-17
Number of pages6
ISBN (Print)0780309588
Publication statusPublished - 1993
Externally publishedYes
EventProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
Duration: 1993 Feb 71993 Feb 10

Publication series

NameIEEE Micro Electro Mechanical Systems

Other

OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
CityFort Lauderdale, FL, USA
Period93/2/793/2/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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