An electromagnetic microrelay is proposed as a practical application of micro electromechanical systems (MEMS) technology and the basic performance of key components is evaluated experimentally and analytically. The relay targets the size of 1 mm3 at which electromagnetic actuation is the most practical and economical choice. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype, having a spiral flat spring with a diagonal length of 0.5 mm is manufactured and its basic switching performance is found to be more than ten times faster than conventional relays.