Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

Jae joon Choi, Kazuyuki Minam, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Abstract

A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis’ force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.

Original languageEnglish
Pages (from-to)641-646
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume118
Issue number12
DOIs
Publication statusPublished - 1998

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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