Electrochemical behaviour of V-groove microelectrodes fabricated by micromachining

Mashio Shibuya, Tetsuya Hasegawa, Tomokazu Matsue, Isamu Uchida

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The electrochemical behaviour of V-groove microelectrodes (10-100 μm wide) was investigated and compared with that of planar band microelectrodes with the same sizes. The V-groove electrodes were fabricated by anisotropic etching on a 〈100〉 silicon wafer in KOH solutions. The cyclic voltammetric investigation at the V-groove electrodes revealed a different scan rate dependence of the peak current from that at the planar band microelectrodes. When the V-groove electrode was covered with a platinum plate lid electrode, the redox cycling between the two electrodes proceeds efficiently, exhibiting higher collection efficiencies than at the ordinary interdigitated microarray electrode with the same size. The high collection efficiency originated from the small effective diffusion length.

Original languageEnglish
Pages (from-to)535-540
Number of pages6
JournalJournal of Electroanalytical Chemistry
Issue number1-2
Publication statusPublished - 1995 Oct 31


  • Microelectrodes
  • Redox cycling

ASJC Scopus subject areas

  • Analytical Chemistry
  • Chemical Engineering(all)
  • Electrochemistry


Dive into the research topics of 'Electrochemical behaviour of V-groove microelectrodes fabricated by micromachining'. Together they form a unique fingerprint.

Cite this