Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion transport through nanopores was observed and could be controlled by application of gate voltages to nanopores.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1253-1256
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Van Toan, N., Inomata, N., Toda, M., & Ono, T. (2018). Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 1253-1256). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346791