Electrical properties and microstructures of ultraviolet transparent Ga2O3 thin films

Yasuhiro Shigetoshi, Susumu Tsukimoto, Hidehisa Takeda, Kazuhiro Ito, Masanori Murakami

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The electrical and optical properties, and microstructures of 100 nm-thick Ga2O3 films fabricated on Al2O 3(0001) substrates by a sputtering deposition were investigated. The partial pressure of oxygen was controlled and the substrate temperature was kept to be 500°C during deposition. With increasing the oxygen partial pressure, the structures of the Ga2O3 films deposited on the substrates were observed to change from amorphous to crystalline (monoclinic β-type Ga2O3). The transmittance of the Ga 2O3 films was measured to be more than 80 % at the visible and ultraviolet regions although the electrical resistivity was high. In order to obtain both low electrical resistivity and high transmittance at the ultraviolet regions, the addition of active dopant elements such as Sn into the Ga2O3 films would be required.

    Original languageEnglish
    Title of host publicationSelected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
    PublisherTrans Tech Publications Ltd
    Pages1233-1236
    Number of pages4
    EditionPART 2
    ISBN (Print)0878494626, 9780878494620
    DOIs
    Publication statusPublished - 2007 Jan 1
    Event6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of
    Duration: 2007 Nov 52007 Nov 9

    Publication series

    NameMaterials Science Forum
    NumberPART 2
    Volume561-565
    ISSN (Print)0255-5476
    ISSN (Electronic)1662-9752

    Other

    Other6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
    CountryKorea, Republic of
    CityJeju
    Period07/11/507/11/9

    Keywords

    • Electrical resistivity
    • Gallium oxide (GaO)
    • Microstructure
    • Partial oxygen pressure
    • Sputter deposition
    • Thin film
    • Transparent

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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