Electrical feedthrough for wafer level packaging and arrayed MEMS

Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Publication statusPublished - 2007 Jan 1
EventSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 - Paris, France
Duration: 2007 Mar 272007 Mar 28

Conference

ConferenceSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
CountryFrance
CityParis
Period07/3/2707/3/28

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications

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