Electrical conductivity measurement for quantitative evaluation of development speed of a photoresists

T. Takeda, Masumi Saka

Research output: Contribution to journalReview articlepeer-review

1 Citation (Scopus)

Abstract

In a previous article, we reported on the possibility of predicting the development speed of a photoresist by measuring its electrical conductivity in an organic solvent [T. Takeda and M. Saka, J. Vac. Sci. Technol. B (submitted)]. The electrical conductivity of the organic solution of a photoresist base polymer at various frequencies was found to have a positive correlation with the dissolution speed of photoresist base polymers into an alkaline developer. In addition, the influence of the measurement temperature and the concentration of polymer solution on conductivity was investigated. Based on the collected data, this article derives the calibration equation, which was influenced neither by measurement temperature nor by the concentration of the solution.

Original languageEnglish
Pages (from-to)2974-2976
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume16
Issue number6
Publication statusPublished - 1998 Nov 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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