Electrical characterization of W/HfO2 MOSFETs with La 2O3 incorporation

Hiroki Fujisawa, A. Srivastava, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, C. K. Sarkar, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Electrical characterization of HfO2 MOSFETs with La 2O3 incorporation has been conducted. A shift in threshold voltage to negative direction has been observed with La2O 3 incorporation. Moreover, gm and subthreshold slope have been improved with La2O3. 1/f noise measurement has revealed that HfO2 gated MOSFET incorporating La2O 3 layer reduces the noise level .

Original languageEnglish
Title of host publicationECS Transactions - ISTC/CSTIC 2009 (CISTC)
Pages39-42
Number of pages4
Edition1 PART 1
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventISTC/CSTIC 2009 (CISTC) - Shanghai, China
Duration: 2009 Mar 192009 Mar 20

Publication series

NameECS Transactions
Number1 PART 1
Volume18
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherISTC/CSTIC 2009 (CISTC)
CountryChina
CityShanghai
Period09/3/1909/3/20

ASJC Scopus subject areas

  • Engineering(all)

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