Electrical and Physical Characterization of Remote Plasma Oxidized HfO2Gate Dielectrics

Kazuhiko Yamamoto, Wim Deweerd, Marc Aoulaiche, Michel Houssa, Stefan De Gendt, Sadayoshi Horii, Misayuki Asai, Atsushi Sano, Shigenori Hayashi, Masaaki Niwa

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6 Citations (Scopus)

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