Elastic anisotropy and incohesive bond of chemical-vapor-deposition diamond film: Acoustic resonance measurements and micromechanics modeling

Nobutomo Nakamura, Hirotsugu Ogi, Tetsu Ichitsubo, Masahiko Hirao, Natsuo Tatsumi, Takahiro Imai, Hideaki Nakahata

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The elastic anisotropy of chemical vapor deposition (CVD) polycrystalline diamond films was analyzed. Acoustic spectroscopy and micromechanics modeling were used to study elastic anisotropy in the diamond films. The CVD diamond films showed five independent elastic constants and exhibited elastic anisotropy between the in-plane direction and the film-growth direction. The results show that local incomplete cohesion was responsible for the small elastic constants and anisotropy of the film.

Original languageEnglish
Pages (from-to)6405-6410
Number of pages6
JournalJournal of Applied Physics
Volume94
Issue number10
DOIs
Publication statusPublished - 2003 Nov 15
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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