Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Hayato Ohashi, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryoichi Hirose, Takeo Ejima, Masaharu Nishikino, Atsushi Sunahara, Enda Scally, Bowen Li, Tatsuya Yanagida, Hiroaki Nishimura, Hiroshi Azechi, Gerry O'Sullivan

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23 Citations (Scopus)

Abstract

We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012W/cm 2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.

Original languageEnglish
Article number086202
JournalApplied Physics Express
Volume7
Issue number8
DOIs
Publication statusPublished - 2014 Aug

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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    Yoshida, K., Fujioka, S., Higashiguchi, T., Ugomori, T., Tanaka, N., Ohashi, H., Kawasaki, M., Suzuki, Y., Suzuki, C., Tomita, K., Hirose, R., Ejima, T., Nishikino, M., Sunahara, A., Scally, E., Li, B., Yanagida, T., Nishimura, H., Azechi, H., & O'Sullivan, G. (2014). Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers. Applied Physics Express, 7(8), [086202]. https://doi.org/10.7567/APEX.7.086202