Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5-6.9-nm wavelength region

Sadayuki Ishikawa, Takashi Imazono, Tadashi Hatano, Mihiro Yanagihara, Makoto Watanabe

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

We applied a Mo/B4C multilayer coating to a laminar holographic grating with 2400 grooves/mm and a 1-m radius of curvature. By use of synchrotron soft x rays the multilayer-coated grating was evaluated to have diffraction efficiencies of 3.1% and 0.017% for s- and p-polarized radiation, respectively, at a 6.7-nm wavelength at a 45.35° grazing angle of incidence in the +1 (inside) grating order. Thus the polarizance was estimated to be 98.9% at least. The zero-order peak was suppressed by the destructive interference caused by the groove profile.

Original languageEnglish
Pages (from-to)763-767
Number of pages5
JournalApplied optics
Volume41
Issue number4
DOIs
Publication statusPublished - 2002 Feb 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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