Effects of substrate bias voltage and target sputtering power on the structural and tribological properties of carbon nitride coatings

Pengfei Wang, Takanori Takeno, Julien Fontaine, Masami Aono, Koshi Adachi, Hiroyuki Miki, Toshiyuki Takagi

Research output: Contribution to journalArticle

12 Citations (Scopus)

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Chemical Compounds

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