Effects of stacking passivation structure with interface tuning layer for crystalline Si solar cell applications

Norihiro Ikeno, Takaaki Katsumata, Yoshihiro Yamashita, Shin Ichi Satoh, Haruhiko Yoshida, Koji Arafune, Toyohiro Chikyo, Atsushi Ogura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricated Y2O3-ZrO2 composition film (YZO) on Al2O3 for the field effect passivation with high negative fixed charge densities on p-type Si. The surface recombination velocity was improved down to 30 cm/s after annealing at 400 °C. High thermal tolerance was confirmed over 600 °C by inserting 2-nm-thick ZrO2 layer between YZO and Al2O3 interface. This result showed ZrO2 layer work as protecting barrier of Al and Y interdiffusions.

Original languageEnglish
Title of host publication2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479979448
DOIs
Publication statusPublished - 2015 Dec 14
Externally publishedYes
Event42nd IEEE Photovoltaic Specialist Conference, PVSC 2015 - New Orleans, United States
Duration: 2015 Jun 142015 Jun 19

Publication series

Name2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015

Other

Other42nd IEEE Photovoltaic Specialist Conference, PVSC 2015
CountryUnited States
CityNew Orleans
Period15/6/1415/6/19

Keywords

  • dielectric stacking structure
  • passivation
  • silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Ikeno, N., Katsumata, T., Yamashita, Y., Satoh, S. I., Yoshida, H., Arafune, K., Chikyo, T., & Ogura, A. (2015). Effects of stacking passivation structure with interface tuning layer for crystalline Si solar cell applications. In 2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015 [7356330] (2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2015.7356330