Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

N. Tanaka; S. Kato; T. Miyamoto; M. Nishiura; K. Tsumori; Y. Matsumoto; T. Kenmotsu; Atsushi Okamoto; S. Kitajima; M. Sasao; M. Wada; H. Yamaoka

doi:10.1063/1.4855455

Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

N. Tanaka, S. Kato, T. Miyamoto, M. Nishiura, K. Tsumori, Y. Matsumoto, T. Kenmotsu, Atsushi Okamoto, S. Kitajima, M. Sasao, M. Wada, H. Yamaoka

ENG - Quantum Science and Energy Engineering

Research output: Contribution to journal › Review article › peer-review

7 Citations (Scopus)

Abstract

Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

Original language	English
Article number	02C311
Journal	Review of Scientific Instruments
Volume	85
Issue number	2
DOIs	https://doi.org/10.1063/1.4855455
Publication status	Published - 2014 Feb

ASJC Scopus subject areas

Instrumentation

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10.1063/1.4855455

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Tanaka, N., Kato, S., Miyamoto, T., Nishiura, M., Tsumori, K., Matsumoto, Y., Kenmotsu, T., Okamoto, A., Kitajima, S., Sasao, M., Wada, M., & Yamaoka, H. (2014). Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces. Review of Scientific Instruments, 85(2), [02C311]. https://doi.org/10.1063/1.4855455

Tanaka, N, Kato, S, Miyamoto, T, Nishiura, M, Tsumori, K, Matsumoto, Y, Kenmotsu, T, Okamoto, A, Kitajima, S, Sasao, M, Wada, M & Yamaoka, H 2014, 'Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces', Review of Scientific Instruments, vol. 85, no. 2, 02C311. https://doi.org/10.1063/1.4855455

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abstract = "Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.",

author = "N. Tanaka and S. Kato and T. Miyamoto and M. Nishiura and K. Tsumori and Y. Matsumoto and T. Kenmotsu and Atsushi Okamoto and S. Kitajima and M. Sasao and M. Wada and H. Yamaoka",

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T1 - Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

AU - Tanaka, N.

AU - Kato, S.

AU - Miyamoto, T.

AU - Nishiura, M.

AU - Tsumori, K.

AU - Matsumoto, Y.

AU - Kenmotsu, T.

AU - Okamoto, Atsushi

AU - Kitajima, S.

AU - Sasao, M.

AU - Wada, M.

AU - Yamaoka, H.

PY - 2014/2

Y1 - 2014/2

N2 - Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

AB - Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

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JF - Review of Scientific Instruments

SN - 0034-6748

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M1 - 02C311

ER -

Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

Abstract

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