Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

N. Tanaka; S. Kato; T. Miyamoto; M. Nishiura; K. Tsumori; Y. Matsumoto; T. Kenmotsu; A. Okamoto; S. Kitajima; M. Sasao; M. Wada; H. Yamaoka

doi:10.1063/1.4855455

Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces

N. Tanaka, S. Kato, T. Miyamoto, M. Nishiura, K. Tsumori, Y. Matsumoto, T. Kenmotsu, A. Okamoto, S. Kitajima, M. Sasao, M. Wada, H. Yamaoka

ENG - Quantum Science and Energy Engineering

Research output: Contribution to journal › Review article

7 Citations (Scopus)

Abstract

Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

Original language	English
Article number	02C311
Journal	Review of Scientific Instruments
Volume	85
Issue number	2
DOIs	https://doi.org/10.1063/1.4855455
Publication status	Published - 2014 Feb

ASJC Scopus subject areas

Instrumentation

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10.1063/1.4855455

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Tanaka, N., Kato, S., Miyamoto, T., Nishiura, M., Tsumori, K., Matsumoto, Y., Kenmotsu, T., Okamoto, A., Kitajima, S., Sasao, M., Wada, M., & Yamaoka, H. (2014). Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces. Review of Scientific Instruments, 85(2), [02C311]. https://doi.org/10.1063/1.4855455

Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces. / Tanaka, N.; Kato, S.; Miyamoto, T.; Nishiura, M.; Tsumori, K.; Matsumoto, Y.; Kenmotsu, T.; Okamoto, A.; Kitajima, S.; Sasao, M.; Wada, M.; Yamaoka, H.

In: Review of Scientific Instruments, Vol. 85, No. 2, 02C311, 02.2014.

Research output: Contribution to journal › Review article

Tanaka, N, Kato, S, Miyamoto, T, Nishiura, M, Tsumori, K, Matsumoto, Y, Kenmotsu, T, Okamoto, A, Kitajima, S, Sasao, M, Wada, M & Yamaoka, H 2014, 'Effects of roughness and temperature on low-energy hydrogen positive and negative ion reflection from silicon and carbon surfaces', Review of Scientific Instruments, vol. 85, no. 2, 02C311. https://doi.org/10.1063/1.4855455

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abstract = "Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.",

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AU - Tanaka, N.

AU - Kato, S.

AU - Miyamoto, T.

AU - Nishiura, M.

AU - Tsumori, K.

AU - Matsumoto, Y.

AU - Kenmotsu, T.

AU - Okamoto, A.

AU - Kitajima, S.

AU - Sasao, M.

AU - Wada, M.

AU - Yamaoka, H.

PY - 2014/2

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N2 - Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

AB - Angle-resolved energy distribution functions of positive and negative hydrogen ions produced from a rough-finished Si surface under 1 keV proton irradiation have been measured. The corresponding distribution from a crystalline surface and a carbon surface are also measured for comparison. Intensities of positive and negative ions from the rough-finished Si are substantially smaller than those from crystalline Si. The angular distributions of these species are broader for rough surface than the crystalline surface. No significant temperature dependence for positive and negative ion intensities is observed for all samples in the temperature range from 300 to 400 K.

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