Effects of process-induced mechanical stress on ESD performance

K. Kubota, K. Okuyama, Hideo Miura, Y. Kawashima, H. Ishizuka, C. Hashimoto

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effects of process-induced mechanical stress on ESD performance'. Together they form a unique fingerprint.

Engineering

Material Science