Effects of oxygen microbubbles on photoresist layers under hot water conditions

Masayoshi Takahashi, Yasuyuki Shirai, Akinobu Teramoto, Tunejirou Takahashi, Katsumi Tatera, Kouhei Matsuura, Hideo Horibe

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We need to enhance the removing ability of microbubbles through the clear understanding of the functional mechanisms of microbubbles for the removal of photoresist layers. The purpose of the present study is to clarify the effect of microbubble on the surface of photoresist layers.

Original languageEnglish
Pages (from-to)643-646
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume29
Issue number4
DOIs
Publication statusPublished - 2016

Keywords

  • Gas-water interface
  • High-dose ion-implantation
  • Microbubbles
  • Oxygen
  • Photoresist

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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