Structures of Ni/C multilayered films prepared by Ar sputtering and reactive sputtering in pure N2 have been investigated using X-ray diffraction and RBS. The higher Bragg peak intensities of nitrided multilayers indicate the suppression of carbide formation at the Ni/C interfaces by nitriding particularly for carbon layers.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics