Effects of discharge frequency on the ion-current density and etching characteristics in high-density Cl2 plasmas

Seiji Samukawa, Tsutomu Tsukada

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint Dive into the research topics of 'Effects of discharge frequency on the ion-current density and etching characteristics in high-density Cl2 plasmas'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy