Effects of deposition conditions on the ferroelectric properties of (Al1- x Sc x)N thin films

Shinnosuke Yasuoka, Takao Shimizu, Akinori Tateyama, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo

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19 Citations (Scopus)

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Physics & Astronomy