Effects of composition segregation in Cu-In precursor films on microstructures of CIS films

Ling Fang, Gong Zhang, Daming Zhuang, Ming Zhao, Qilin Zheng, Xiaofeng Ding, Minsheng Wu

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Cu-In precursor films with a Cu/In atomic ratio approaching 1 were prepared using middle frequency A. C. magnetron sputtering with a Cu-In alloy target to investigate local agglomeration in Cu-In alloy layers and its effects on the element distributions and microstructure of selenized CuInSe2 (CIS) films. CIS absorbers for solar cells were formed by the selenization process in a selenium atmosphere. Scanning electron microscopy and energy dispersive X-ray analysis were used to observe the surface morphologies and determine the compositions of both the Cu-In precursor films and the CIS films. Their microstructures were characterized by X-ray diffraction and Raman spectroscopy. The results show that the Cu-In alloy films are mainly composed of a Cu11In9 phase with an in-rich solid solution appearing as particles in the films. Stoichiometric CIS film can be synthesized with a homogeneous element distribution and a single chalcopyrite phase from the Cu-In precursor film with a Cu/In atomic ratio of 1. The CIS film exhibits p-type conduction and has a resistivity reaching 1.2 kΩ·cm.

Original languageEnglish
Pages (from-to)593-596
Number of pages4
JournalQinghua Daxue Xuebao/Journal of Tsinghua University
Issue number5
Publication statusPublished - 2004 May


  • CIS thin film
  • Cu-In precursor film
  • Magnetron sputtering
  • Selenization
  • Solar cell

ASJC Scopus subject areas

  • Engineering(all)


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