Effects of atomic collisions on the stoichiometry of thin films prepared by pulsed laser deposition

Daniel M. Packwood, Susumu Shiraki, Taro Hitosugi

    Research output: Contribution to journalArticlepeer-review

    24 Citations (Scopus)

    Abstract

    We present an analytical model to quantitatively study the effect of collisions between the atoms of a plume and the molecules of a surrounding gas on the nonstoichiometry of lithium-containing oxide thin films deposited using pulsed laser deposition. A comparison of the experimental data and the model ascertain the inevitable loss of the lighter cation, leading to a nonstoichiometric reduction in the content of lighter cations in the films. Our model is the first analytic model of collision-induced plume expansion that can explain the partial oxygen pressure dependence of the Li content of a thin film. These studies have important implications for collision effects that affect the growth of thin films containing both light and heavy elements.

    Original languageEnglish
    Article number036101
    JournalPhysical review letters
    Volume111
    Issue number3
    DOIs
    Publication statusPublished - 2013 Jul 16

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

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