Effects of annealing temperature on sensing properties of magnetic-tunnel-junction-based sensors with perpendicular synthetic antiferromagnetic Co/Pt pinned layer

Takahiro Ogasawara; Mikihiko Oogane; Masakiyo Tsunoda; Yasuo Ando

doi:10.7567/JJAP.57.110308

Effects of annealing temperature on sensing properties of magnetic-tunnel-junction-based sensors with perpendicular synthetic antiferromagnetic Co/Pt pinned layer

Takahiro Ogasawara, Mikihiko Oogane, Masakiyo Tsunoda, Yasuo Ando

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We studied the effects of annealing temperature on the sensing properties of linear-output magnetic sensor devices fabricated using a CoFeB/MgO/CoFeB magnetic tunnel junction (MTJ) with a perpendicular synthetic antiferromagnetic (p-SAF) Co/Pt pinned layer. Owing to the large exchange coupling of the p-SAF Co/Pt pinned layer, linear tunnel magnetoresistance (TMR) curves were observed within a wide range of over ±3 kOe. In terms of sensing properties, the MTJ after annealing at 300 °C showed the highest sensitivity of 0.033%/Oe owing to the large TMR ratio of 164%. Moreover, the achieved nonlinearity of 0.061% full scale (FS) is quite low, which is comparable to that of commercialized Hall sensors.

Original language	English
Article number	110308
Journal	Japanese journal of applied physics
Volume	57
Issue number	11
DOIs	https://doi.org/10.7567/JJAP.57.110308
Publication status	Published - 2018 Nov

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Effects of annealing temperature on sensing properties of magnetic-tunnel-junction-based sensors with perpendicular synthetic antiferromagnetic Co/Pt pinned layer. / Ogasawara, Takahiro; Oogane, Mikihiko ; Tsunoda, Masakiyo ; Ando, Yasuo.

In: Japanese journal of applied physics, Vol. 57, No. 11, 110308, 11.2018.

Research output: Contribution to journal › Article › peer-review

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