The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb soft magnetic layer for a perpendicular magnetic recording medium is investigated. The shroud has the advantage of removing water from the sputtering atmosphere, and also enables quick pumping. Consequently, deposited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.
- Aluminum chamber
- EL process
- Liquid-nitrogen shroud
- Magnetic recording media - perpendicular
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics