Effects of a liquid-nitrogen shroud on the depositing of soft magnetic films

E. Nakashio; I. Watanabe; H. Muraoka; Y. Nakamura

doi:10.1016/S0304-8853(97)00584-2

Effects of a liquid-nitrogen shroud on the depositing of soft magnetic films

E. Nakashio, I. Watanabe, H. Muraoka, Y. Nakamura

Broadband Engineering Division

Research output: Contribution to journal › Article › peer-review

Abstract

The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb soft magnetic layer for a perpendicular magnetic recording medium is investigated. The shroud has the advantage of removing water from the sputtering atmosphere, and also enables quick pumping. Consequently, deposited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.

Original language	English
Pages (from-to)	46-50
Number of pages	5
Journal	Journal of Magnetism and Magnetic Materials
Volume	176
Issue number	1
DOIs	https://doi.org/10.1016/S0304-8853(97)00584-2
Publication status	Published - 1997 Dec

Keywords

Aluminum chamber
EL process
Liquid-nitrogen shroud
Magnetic recording media - perpendicular

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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abstract = "The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb soft magnetic layer for a perpendicular magnetic recording medium is investigated. The shroud has the advantage of removing water from the sputtering atmosphere, and also enables quick pumping. Consequently, deposited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.",

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AU - Nakashio, E.

AU - Watanabe, I.

AU - Muraoka, H.

AU - Nakamura, Y.

PY - 1997/12

Y1 - 1997/12

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AB - The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb soft magnetic layer for a perpendicular magnetic recording medium is investigated. The shroud has the advantage of removing water from the sputtering atmosphere, and also enables quick pumping. Consequently, deposited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.

KW - Aluminum chamber

KW - EL process

KW - Liquid-nitrogen shroud

KW - Magnetic recording media - perpendicular

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ER -

Effects of a liquid-nitrogen shroud on the depositing of soft magnetic films

Abstract

Keywords

ASJC Scopus subject areas

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