Effects of a liquid-nitrogen shroud on the depositing of soft magnetic films

E. Nakashio, I. Watanabe, H. Muraoka, Y. Nakamura

Research output: Contribution to journalArticle

Abstract

The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb soft magnetic layer for a perpendicular magnetic recording medium is investigated. The shroud has the advantage of removing water from the sputtering atmosphere, and also enables quick pumping. Consequently, deposited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.

Original languageEnglish
Pages (from-to)46-50
Number of pages5
JournalJournal of Magnetism and Magnetic Materials
Volume176
Issue number1
DOIs
Publication statusPublished - 1997 Dec

Keywords

  • Aluminum chamber
  • EL process
  • Liquid-nitrogen shroud
  • Magnetic recording media - perpendicular

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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