Effective Young's modulus measurement of thin film using micromechanical cantilever sensors

Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Förch, Rüdiger Berger

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Determination of mechanical properties of thin films, such as the Young's modulus, is of fundamental importance when the films are used for coating or for materials of microelectromechanical systems (MEMS). We show a simple method to calculate the effective Young's modulus of thin films by comparing lateral and vertical expansions. The stress of the film due to expansion in the lateral direction was measured using micromechanical cantilever sensor (MCS) techniques which allow for a calculation of the lateral expansion ratio of the film. The vertical expansion was measured using ellipsometry, surface plasmon resonance (SPR) and other film thickness meters. There is no limitation by the method for a measurement of Young's modulus, even if soft and thin polymer film. We detected the influence of humidity on effective Young's modulus of a polymer material by the method, as an example.

Original languageEnglish
Article number110111
JournalJapanese journal of applied physics
Issue number11 PART 1
Publication statusPublished - 2013 Nov

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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