Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition

Zhanxy Jie Wang, Yuki Aoki, Hiroyuki Kokawa, Masaaki Ichiki, Ryutaro Maeda

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

PZT films were fabricated using various targets of Pb(Zr x Ti1 - x )O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt% on Pt/Ti/SiO2/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48.

Original languageEnglish
Pages (from-to)41-45
Number of pages5
JournalJournal of Electroceramics
Volume13
Issue number1-3
DOIs
Publication statusPublished - 2004 Jul 1

Keywords

  • Crystalline phases
  • Ferroelectric properties
  • Lead zirconate titanate
  • Microstructure
  • Pulsed laser deposition
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering

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