Effect of Zr/Ti ratio in targets on electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition on template layer

Zhan Jie Wang, Isao Karibe, Li Jun Yan, Hiroyuki Kokawa, Ryutaro Maeda

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Using various targets of Pb(ZrxTi1-x)O3 (PZT) with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, PZT thin films were prepared by pulsed laser deposition on Pt/Ti/SiO2/Si(100) substrates with a template layer derived by the sol-gel process. The structure and crystalline phases of the PZT films relative to the Zr/Ti ratio were investigated by X-ray diffraction analysis. The effect of the Zr/Ti ratio in the targets on the electrical properties of the PZT thin films was investigated by measuring the polarization versus electric field hysteresis loop and the dielectric constant. It was found that the PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48, and their composition was close to the morphotropic phase boundary composition. The remanent polarization and the coercive field of the film were 31.28 μC/cm2 and 45.29 kV/cm, while the dielectric constant and dielectric loss tangent measured at 1 kHz were approximately 1069 and 0.08, respectively. It was clarified that the template layer derived by the sol-gel process can lower the annealing temperature in the pulsed laser deposition process, and improve the electrical properties of the PZT films.

Original languageEnglish
Pages (from-to)6658-6663
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number11 B
DOIs
Publication statusPublished - 2002 Nov 1

Keywords

  • Crystalline phases
  • Ferroelectric properties
  • Lead zirconate titanate
  • Pulsed laser deposition method
  • Sol-gel method

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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