Effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process

Yasa Sampurno, Yun Zhuang, Xun Gu, Sian Theng, Takenao Nemoto, Ting Sun, Fransisca Sudargho, Akinobu Teramoto, Ara Philipossian, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy