Effect of temperature on degradation of polymers for photoresist using ozone microbubbles

Kohei Matsuura, Takashi Nishiyama, Eriko Sato, Masashi Yamamoto, Tomosumi Kamimura, Masayoshi Takahashi, Kunihiko Koike, Hideo Horibe

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds