TY - GEN
T1 - Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO3 seed layers by metallorganic chemical vapor deposition
AU - Moon, Ji Won
AU - Tazawa, Shogo
AU - Wakiya, Naoki
AU - Kiguchi, Takanori
AU - Ishida, Youhei
AU - Mizutani, Nobuyasu
AU - Shinozaki, Kazuo
PY - 2007
Y1 - 2007
N2 - Pb(Zr, Ti)O3 thin films were successfully prepared on (111)Pt/IrO2/SiO2/(100)Si substrates using SrTiO 3 seeds at 290°C by RF inductive heating type and 350°C by resistive heating type metalorganic chemical vapor deposition method (MOCVD), respectively. The SrTiO3 was chosen as seed layers and prepared by pulsed laser deposition method. The crystal structures and orientations of SrTiO3 seeds were changed by deposition temperature. In the case of preparation with RF inductive heating MOCVD, the remanent polarization (2Pr) and coercive field (2Ec) were 42 μC/cm2 and 256 kV/cm, respectively.
AB - Pb(Zr, Ti)O3 thin films were successfully prepared on (111)Pt/IrO2/SiO2/(100)Si substrates using SrTiO 3 seeds at 290°C by RF inductive heating type and 350°C by resistive heating type metalorganic chemical vapor deposition method (MOCVD), respectively. The SrTiO3 was chosen as seed layers and prepared by pulsed laser deposition method. The crystal structures and orientations of SrTiO3 seeds were changed by deposition temperature. In the case of preparation with RF inductive heating MOCVD, the remanent polarization (2Pr) and coercive field (2Ec) were 42 μC/cm2 and 256 kV/cm, respectively.
KW - Low-temperature preparation
KW - Seed layer
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=38549111298&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38549111298&partnerID=8YFLogxK
U2 - 10.4028/3-908451-31-0.153
DO - 10.4028/3-908451-31-0.153
M3 - Conference contribution
AN - SCOPUS:38549111298
SN - 3908451310
SN - 9783908451310
T3 - Solid State Phenomena
SP - 153
EP - 156
BT - Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
PB - Trans Tech Publications Ltd
T2 - IUMRS International Conference in Asia 2006, IUMRS-ICA 2006
Y2 - 10 September 2006 through 14 September 2006
ER -