Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO3 seed layers by metallorganic chemical vapor deposition

Ji Won Moon; Shogo Tazawa; Naoki Wakiya; Takanori Kiguchi; Youhei Ishida; Nobuyasu Mizutani; Kazuo Shinozaki

Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition

Ji Won Moon, Shogo Tazawa, Naoki Wakiya, Takanori Kiguchi, Youhei Ishida, Nobuyasu Mizutani, Kazuo Shinozaki

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Pb(Zr, Ti)O₃ thin films were successfully prepared on (111)Pt/IrO₂/SiO₂/(100)Si substrates using SrTiO ₃ seeds at 290°C by RF inductive heating type and 350°C by resistive heating type metalorganic chemical vapor deposition method (MOCVD), respectively. The SrTiO₃ was chosen as seed layers and prepared by pulsed laser deposition method. The crystal structures and orientations of SrTiO₃ seeds were changed by deposition temperature. In the case of preparation with RF inductive heating MOCVD, the remanent polarization (2Pr) and coercive field (2Ec) were 42 μC/cm² and 256 kV/cm, respectively.

Original language	English
Title of host publication	Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
Publisher	Trans Tech Publications Ltd
Pages	153-156
Number of pages	4
Edition	PART 1
ISBN (Print)	3908451310, 9783908451310
Publication status	Published - 2007 Jan 1
Externally published	Yes
Event	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of Duration: 2006 Sep 10 → 2006 Sep 14

Publication series

Name	Solid State Phenomena
Number	PART 1
Volume	124-126
ISSN (Print)	1012-0394

Other

Other	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006
Country	Korea, Republic of
City	Jeju
Period	06/9/10 → 06/9/14

Keywords

Low-temperature preparation
Seed layer
Thin film

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

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Cite this

Moon, J. W., Tazawa, S., Wakiya, N., Kiguchi, T., Ishida, Y., Mizutani, N., & Shinozaki, K. (2007). Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition. In Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia (PART 1 ed., pp. 153-156). (Solid State Phenomena; Vol. 124-126, No. PART 1). Trans Tech Publications Ltd.

Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition. / Moon, Ji Won; Tazawa, Shogo; Wakiya, Naoki; Kiguchi, Takanori; Ishida, Youhei; Mizutani, Nobuyasu; Shinozaki, Kazuo.

Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1. ed. Trans Tech Publications Ltd, 2007. p. 153-156 (Solid State Phenomena; Vol. 124-126, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Moon, JW, Tazawa, S, Wakiya, N, Kiguchi, T, Ishida, Y, Mizutani, N & Shinozaki, K 2007, Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition. in Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1 edn, Solid State Phenomena, no. PART 1, vol. 124-126, Trans Tech Publications Ltd, pp. 153-156, IUMRS International Conference in Asia 2006, IUMRS-ICA 2006, Jeju, Korea, Republic of, 06/9/10.

Moon JW, Tazawa S, Wakiya N, Kiguchi T, Ishida Y, Mizutani N et al. Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition. In Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1 ed. Trans Tech Publications Ltd. 2007. p. 153-156. (Solid State Phenomena; PART 1).

Moon, Ji Won ; Tazawa, Shogo ; Wakiya, Naoki ; Kiguchi, Takanori ; Ishida, Youhei ; Mizutani, Nobuyasu ; Shinozaki, Kazuo. / Effect of source supply methods on low-temperature preparation of lead zirconate titanate thin films using SrTiO₃ seed layers by metallorganic chemical vapor deposition. Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1. ed. Trans Tech Publications Ltd, 2007. pp. 153-156 (Solid State Phenomena; PART 1).

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abstract = "Pb(Zr, Ti)O3 thin films were successfully prepared on (111)Pt/IrO2/SiO2/(100)Si substrates using SrTiO 3 seeds at 290°C by RF inductive heating type and 350°C by resistive heating type metalorganic chemical vapor deposition method (MOCVD), respectively. The SrTiO3 was chosen as seed layers and prepared by pulsed laser deposition method. The crystal structures and orientations of SrTiO3 seeds were changed by deposition temperature. In the case of preparation with RF inductive heating MOCVD, the remanent polarization (2Pr) and coercive field (2Ec) were 42 μC/cm2 and 256 kV/cm, respectively.",

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AU - Kiguchi, Takanori

AU - Ishida, Youhei

AU - Mizutani, Nobuyasu

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AB - Pb(Zr, Ti)O3 thin films were successfully prepared on (111)Pt/IrO2/SiO2/(100)Si substrates using SrTiO 3 seeds at 290°C by RF inductive heating type and 350°C by resistive heating type metalorganic chemical vapor deposition method (MOCVD), respectively. The SrTiO3 was chosen as seed layers and prepared by pulsed laser deposition method. The crystal structures and orientations of SrTiO3 seeds were changed by deposition temperature. In the case of preparation with RF inductive heating MOCVD, the remanent polarization (2Pr) and coercive field (2Ec) were 42 μC/cm2 and 256 kV/cm, respectively.

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