Effect of silicon wafer in situ cleaning on the chemical structure of ultrathin silicon oxide film

Naozumi Terada, Hiroki Ogawa, Kazunori Moriki, Akinobu Teramoto, Koji Makihara, Mizuho Morita, Tadahiro Ohmi, Takeo Hattori

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14 Citations (Scopus)

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Physics

Chemistry

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Biochemistry, Genetics and Molecular Biology

Material Science