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Effect of RF coil position on spoke pattern on oxide melt surface in Czochralski crystal growth
C. J. Jing, M. Kobayashi, T. Tsukada, M. Hozawa, T. Fukuda, N. Imaishi, K. Shimamura, N. Ichinose
Research output: Contribution to journal › Article › peer-review
21
Citations
(Scopus)