Effect of purity on the fabrication of Al micro/thin-materials by utilizing electromigration

Yebo Lu, Masumi Saka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

The effect of purity on the fabrication of Al micro/thin-materials (MTMs) by utilizing electromigration (EM) has been investigated. The samples that were used to fabricate the Al MTMs were passivated polycrystalline Al lines incorporating a slit and small holes at the anode end of each sample. Al materials of different purity, 99% (2 N) and 99.99% (4 N), were used, and it was found that the atomic flux of the 2 N sample was significantly larger than that of the 4 N sample, leading to the enhanced fabrication of Al MTMs due to EM under the same experimental conditions, which turned out to be related to a decrease in the activation energy for grain boundary diffusion.

Original languageEnglish
Pages (from-to)2294-2296
Number of pages3
JournalMaterials Letters
Volume63
Issue number27
DOIs
Publication statusPublished - 2009 Nov 15

Keywords

  • Activation energy
  • Electromigration
  • Micro/thin-materials
  • Purity

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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