Abstract
Scanning electron microscopy (SEM) and high-resolution electron backscatter diffraction (EBSD) has been employed to study the microstructure development of -oriented β-SiC films prepared by laser chemical vapor deposition (LCVD) with various total pressure (Ptot). The Surface morphology of films evolved from pyramids with sixfold symmetry to needlelike structure by increasing the Ptot. The EBSD results indicated that the higher Ptot (800 Pa) led to the lower neighbor-pair misorientation and large in-plane domains in β-SiC films.
Original language | English |
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Pages (from-to) | 3713-3718 |
Number of pages | 6 |
Journal | Journal of the American Ceramic Society |
Volume | 98 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2015 Dec 1 |
ASJC Scopus subject areas
- Ceramics and Composites
- Materials Chemistry