Effect of precursor supply on (100) and (001) orientations of α-Al2O3 film prepared by laser CVD

Kadokura Hokuto, Akihiko Ito, Teiichi Kimura, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

α-Al2O3 films were prepared by laser chemical vapor deposition and the effects of precursor evaporation temperature (T vap) and oxygen gas flow rate (FRO) on phase and orientation of Al2O3 films were investigated. At T vap = 413 K, (100)-oriented α-Al2O3 and θ-Al2O3 were codeposited. The amount of θ-Al2O3 increased with increasing FRO. At Tvap = 433-443 K, α-Al2O3 films showed a (001) orientation. (100)- and (001)-oriented α-Al2O 3 films had a rectangular- and hexagonal-shaped grains, respectively, and showed a columnar in cross section. Grain size of (100)- and (001)-oriented α-Al2O3 films decreased from 10 to 2 μm with increasing FRO from 0.085 to 0.85 Pa m3 s-1. Deposition rate increased from 100 to 300 μm h-1 with increasing Tvap from 413 to 443 K.

Original languageEnglish
Title of host publicationMaterials Integration
PublisherTrans Tech Publications Ltd
Pages3-6
Number of pages4
ISBN (Print)9783037853764
DOIs
Publication statusPublished - 2012
EventInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
Duration: 2011 Dec 12011 Dec 2

Publication series

NameKey Engineering Materials
Volume508
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
CountryJapan
CitySendai
Period11/12/111/12/2

Keywords

  • Orientation

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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