Effect of oxygen plasma annealing on superconducting properties of Bi 2(Sr,Ca)3Cu2Ox and YBa 2Cu3O7-δ thin films

T. Yoshitake, S. Miura, J. Fujita, N. Shohata, H. Igarashi, T. Satoh, A. Sekiguchi, K. Katoh

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Abstract

Thin films of the Bi2(Sr,Ca)3Cu2O x and YBa2Cu3O7-δ system were annealed at 400°C in a high-density oxygen plasma and its effect on superconducting properties was investigated. After being annealed in the oxygen plasma, their superconducting transition temperatures decreased by about 10 K and 2 K, respectively, and the c-axis lattice constants of these films were also found to decrease as a result of the annealing in the oxygen plasma. These results suggest that excessive oxygen incorporated into the films by the annealing in the oxygen plasma caused the excessive hole carriers, which deteriorated the superconducting transition temperatures of these films.

Original languageEnglish
Pages (from-to)575-577
Number of pages3
JournalApplied Physics Letters
Volume56
Issue number6
DOIs
Publication statusPublished - 1990
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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