Abstract
Effect of oxidation on the grain size reduction for amorphous seedlayer was discussed. The media was deposited onto glass substrates by dc magnetron sputtering. Results showed that the reduction in grain size is mainly due to uniform oxidation of the initial growth of the underlayer.
Original language | English |
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Journal | Digests of the Intermag Conference |
Publication status | Published - 2003 Oct 1 |
Event | Intermag 2003: International Magnetics Conference - Boston, MA, United States Duration: 2003 Mar 28 → 2003 Apr 3 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering