Effect of nitrogen content on the microstructure and mechanical properties of Ti-Mo-N coating films

Shoko Komiyama, Yuji Sutou, Junichi Koike

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Effects of nitrogen content on the microstructure, hardness, and friction coefficient of Ti-Mo-N coating films were investigated. Ti-Mo-N films were deposited onto an AISI304 stainless steel substrate by reactive r.f. sputtering in the mixture of argon and nitrogen gases with various gas flow rates. The hardness and friction coefficients were measured by nanoindentation and ball-on-disk testing systems, respectively. The hardness of the Ti-Mo-N films increased with increasing a nitrogen gas flow rate (fN2) and showed a maximum hardness of about 30 GPa at a fN2 = 0:3 ccm. On the one hand, the films deposited at fN2 ≤ 1:0 ccm showed a constant hardness value of approximately 25 GPa. On the other hand, the friction coefficient of the Ti-Mo-N film decreased with increasing N content and was 0.44 in the film deposited at fN2 = 2:0 ccm.

Original languageEnglish
Pages (from-to)3310-3315
Number of pages6
JournalMetallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
Volume42
Issue number11
DOIs
Publication statusPublished - 2011 Nov 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

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