Effect of NH3 atmosphere on preparation of Al2O 3-AlN composite film by laser CVD

Yu You, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O 3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH 3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862-887 K), and AlN granular grains were embedded in between α-Al2O 3 polyhedral grains.

Original languageEnglish
Title of host publicationAdvanced Engineering Ceramics and Composites
PublisherTrans Tech Publications Ltd
Pages172-176
Number of pages5
ISBN (Print)9783037851814
DOIs
Publication statusPublished - 2011 Jan 1

Publication series

NameKey Engineering Materials
Volume484
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • AlN
  • Composite film
  • Laser CVD

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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