Effect of laser wavelength on phase and microstructure of TiO2 films prepared by laser chemical vapor deposition

Ming Gao, Akihiko Ito, Takashi Goto

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Rutile and anatase TiO2 films were prepared by laser chemical vapor deposition using CO2 and Nd:YAG lasers. The effects of laser wavelength on the phase, orientation, and microstructure of these TiO2 films were investigated. Using a CO2 laser, single-phase rutile TiO2 films were obtained at 826-1225K. These films showed a (100) orientation and a dense structure. The highest deposition rate was 83μmh-1 at 1070K. Using a Nd:YAG laser, the phase of the TiO2 films changed from rutile to anatase with increasing deposition temperature from 852 to 1230K. The rutile TiO2 films showed a (100) orientation with a columnar structure, while the anatase TiO2 films exhibited a (001) orientation with a cauliflower-like structure. Using a Nd:YAG laser, the highest deposition rates for rutile and anatase TiO2 films were 142 and 40μmh-1, respectively.

Original languageEnglish
Pages (from-to)166-172
Number of pages7
JournalSurface and Coatings Technology
Volume244
DOIs
Publication statusPublished - 2014 Apr 15

Keywords

  • Anatase
  • Laser CVD
  • Rutile
  • Thick film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Effect of laser wavelength on phase and microstructure of TiO<sub>2</sub> films prepared by laser chemical vapor deposition'. Together they form a unique fingerprint.

Cite this