TY - JOUR
T1 - Effect of laser power on orientation and microstructure of Ba 2 TiO 4 film prepared by laser chemical vapor deposition
AU - Guo, Dongyun
AU - Goto, Takashi
AU - Wang, Chuanbin
AU - Shen, Qiang
AU - Zhang, Lianmeng
N1 - Funding Information:
This work was supported in part by Global COE Program of the Materials Integration, Tohoku University , and by the International Science and Technology Cooperation Program of China (Grant No. 2009DFB50470 ).
Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.
PY - 2012/8/1
Y1 - 2012/8/1
N2 - Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.
AB - Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.
KW - Laser chemical vapor deposition
KW - Laser power
KW - Orientation
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U2 - 10.1016/j.apsusc.2012.04.104
DO - 10.1016/j.apsusc.2012.04.104
M3 - Article
AN - SCOPUS:84862569333
VL - 258
SP - 7860
EP - 7863
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 20
ER -