Effect of laser power on orientation and microstructure of Ba 2 TiO 4 film prepared by laser chemical vapor deposition

Dongyun Guo, Takashi Goto, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.

Original languageEnglish
Pages (from-to)7860-7863
Number of pages4
JournalApplied Surface Science
Volume258
Issue number20
DOIs
Publication statusPublished - 2012 Aug 1

Keywords

  • Laser chemical vapor deposition
  • Laser power
  • Orientation

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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