Effect of laser power on orientation and microstructure of Ba                          2                         TiO                         4                          film prepared by laser chemical vapor deposition

Dongyun Guo; Takashi Goto; Chuanbin Wang; Qiang Shen; Lianmeng Zhang

doi:10.1016/j.apsusc.2012.04.104

Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition

Dongyun Guo, Takashi Goto, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

Materials Processing and Characterization Division

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

Ba ₂ TiO ₄ films were prepared on Pt/Ti/SiO ₂ /Si substrates by laser chemical vapor deposition method. The effect of laser power (P _L ) on orientation and microstructure was investigated. With increasing P _L from 52 to 93 W, the deposition temperature (T _dep ) increased from 845 to 946 K. With increasing T _dep from 845 to 927 K, the preferred orientation of Ba ₂ TiO ₄ films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T _dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba ₂ TiO ₄ film prepared at 881 K had high deposition rate (R _dep ) of 51.4 μm h ^-1 , which was advantageous to industrial production.

Original language	English
Pages (from-to)	7860-7863
Number of pages	4
Journal	Applied Surface Science
Volume	258
Issue number	20
DOIs	https://doi.org/10.1016/j.apsusc.2012.04.104
Publication status	Published - 2012 Aug 1

Keywords

Laser chemical vapor deposition
Laser power
Orientation

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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Guo, D., Goto, T., Wang, C., Shen, Q., & Zhang, L. (2012). Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition Applied Surface Science, 258(20), 7860-7863. https://doi.org/10.1016/j.apsusc.2012.04.104

Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition . / Guo, Dongyun; Goto, Takashi; Wang, Chuanbin; Shen, Qiang; Zhang, Lianmeng.

In: Applied Surface Science, Vol. 258, No. 20, 01.08.2012, p. 7860-7863.

Research output: Contribution to journal › Article

Guo, D, Goto, T, Wang, C, Shen, Q & Zhang, L 2012, ' Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition ', Applied Surface Science, vol. 258, no. 20, pp. 7860-7863. https://doi.org/10.1016/j.apsusc.2012.04.104

Guo D, Goto T, Wang C, Shen Q, Zhang L. Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition Applied Surface Science. 2012 Aug 1;258(20):7860-7863. https://doi.org/10.1016/j.apsusc.2012.04.104

Guo, Dongyun ; Goto, Takashi ; Wang, Chuanbin ; Shen, Qiang ; Zhang, Lianmeng. / Effect of laser power on orientation and microstructure of Ba ₂ TiO ₄ film prepared by laser chemical vapor deposition In: Applied Surface Science. 2012 ; Vol. 258, No. 20. pp. 7860-7863.

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title = " Effect of laser power on orientation and microstructure of Ba 2 TiO 4 film prepared by laser chemical vapor deposition ",

abstract = " Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.",

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AU - Zhang, Lianmeng

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N2 - Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.

AB - Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.

KW - Laser chemical vapor deposition

KW - Laser power

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