Effect of laser power on microstructure and dielectric properties of BaTi5O11 films prepared by laser chemical vapor deposition method

Dongyun Guo, Akihiko Ito, Takashi Goto, Rong Tu, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

BaTi5O11 films were prepared on Pt/Ti/SiO 2/Si substrates by a laser chemical vapor deposition method. The effect of laser power (PL) on microstructure and dielectric properties of the BaTi5O11 films was investigated. With increasing PL from 62 to 108 W, the deposition temperature (Tdep) monotonously increased from 872 to 951 K. At Tdep = 920 K (PL = 90 W), the BaTi5O11 film had (301) preferred orientation. At Tdep C 938 K (PL C 98 W), the preferred orientation changed to (322)/(223). The deposition rate (Rdep) was 154.8-177.6 μm h-1. With increasing Tdep, the surface morphologies changed from rectangular to pyramidal, and the dielectric constant (er) increased from 18.3 to 21.4 at 1 MHz and 300 K.

Original languageEnglish
Pages (from-to)1961-1964
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Volume23
Issue number11
DOIs
Publication statusPublished - 2012 Nov

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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