Effect of forming gas annealing on improvement in crystal orientation of solid-phase calcined CuCrO2 thin film

Kotaro Ohno, Takeru Okada, Tomoyuki Kawashima, Katsuyoshi Washio

Research output: Contribution to journalArticlepeer-review

Abstract

Effect of forming gas (mixture gas of 5% hydrogen gas in nitrogen gas) annealing in formation of CuCrO2 thin film via solid phase calcination was investigated. Forming gas annealing contributed to reduce Cu2+ ions in an amorphous CuCrO2 film to Cu+ ions, so both out-of-plane and in-plane crystalline orientations were improved. Supplementation of oxygen vacancies in CuCrO2 formed by reactive sputtering carried in the mixture gas of Ar and O2 enhanced the effect of Cu2+ reduction by forming gas annealing. Forming gas annealing was effective to obtain one-tenth smaller resistivity but was not effective to improve optical transmittance.

Original languageEnglish
Article number138386
JournalThin Solid Films
Volume714
DOIs
Publication statusPublished - 2020 Nov 30

Keywords

  • Calcination
  • Copper-chromium oxide
  • Crystallinity
  • Delafossite
  • Electrical properties
  • Optical properties
  • Transparent conductive oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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