Effect of electron temperature on negative hydrogen ion production in a low-pressure Ar discharge plasma with methane

S. Iizuka; T. Koizumi; T. Takada; N. Sato

doi:10.1063/1.110714

Effect of electron temperature on negative hydrogen ion production in a low-pressure Ar discharge plasma with methane

S. Iizuka, T. Koizumi, T. Takada, N. Sato

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Production of negative hydrogen ions (H^-) is continuously controlled in a low-pressure Ar discharge plasma with methane by using a pin-hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.

Original language	English
Pages (from-to)	1619-1621
Number of pages	3
Journal	Applied Physics Letters
Volume	63
Issue number	12
DOIs	https://doi.org/10.1063/1.110714
Publication status	Published - 1993 Dec 1

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.110714

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title = "Effect of electron temperature on negative hydrogen ion production in a low-pressure Ar discharge plasma with methane",

abstract = "Production of negative hydrogen ions (H-) is continuously controlled in a low-pressure Ar discharge plasma with methane by using a pin-hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.",

author = "S. Iizuka and T. Koizumi and T. Takada and N. Sato",

year = "1993",

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journal = "Applied Physics Letters",

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AU - Iizuka, S.

AU - Koizumi, T.

AU - Takada, T.

AU - Sato, N.

PY - 1993/12/1

Y1 - 1993/12/1

N2 - Production of negative hydrogen ions (H-) is continuously controlled in a low-pressure Ar discharge plasma with methane by using a pin-hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.

AB - Production of negative hydrogen ions (H-) is continuously controlled in a low-pressure Ar discharge plasma with methane by using a pin-hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.

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JF - Applied Physics Letters

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