Effect of electron temperature on negative hydrogen ion production in a low-pressure Ar discharge plasma with methane

S. Iizuka, T. Koizumi, T. Takada, N. Sato

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Production of negative hydrogen ions (H-) is continuously controlled in a low-pressure Ar discharge plasma with methane by using a pin-hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.

Original languageEnglish
Pages (from-to)1619-1621
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number12
DOIs
Publication statusPublished - 1993 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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