Abstract
The relationship between CVD deposition temperature and the resulting deposit's crystallinity and superconducting characteristics was examined for Y-Ba-Cu-O films prepared on SrTiO3 (100) single-crystal substrates. The source materials used in the CVD process were β-diketone metal chelates. The crystallinity was evaluated from an integral width of a (007) X-ray diffraction peak of YBa2Cu3O7-x deposited at 600-900°C. The films deposited at 750-900°C showed not only a higher crystallinity level than that of the films deposited at 600-700°C but also exhibited superconductivity. The highest level of crystallinity, the highest zero-resistance (Tc = 91.5 K) and the highest critical-current density (3.9 × 105 A/cm2) at 77.3 K and 0 T were measured for the film deposited a 850°C. This film consisted of mostly c-axis oriented grains with a few a-axis oriented grains.
Original language | English |
---|---|
Pages (from-to) | 860-866 |
Number of pages | 7 |
Journal | Journal of Crystal Growth |
Volume | 98 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1989 Dec |
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry