Effect of deposition temperature on the superconducting properties of Y-Ba-Cu-O films prepared by CVD

Hisanori Yamane, Hideyuki Kurosawa, Toshio Hirai, Kazuo Watanabe, Hideo Iwasaki, Norio Kobayashi, Yoshio Muto

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

Abstract

The relationship between CVD deposition temperature and the resulting deposit's crystallinity and superconducting characteristics was examined for Y-Ba-Cu-O films prepared on SrTiO3 (100) single-crystal substrates. The source materials used in the CVD process were β-diketone metal chelates. The crystallinity was evaluated from an integral width of a (007) X-ray diffraction peak of YBa2Cu3O7-x deposited at 600-900°C. The films deposited at 750-900°C showed not only a higher crystallinity level than that of the films deposited at 600-700°C but also exhibited superconductivity. The highest level of crystallinity, the highest zero-resistance (Tc = 91.5 K) and the highest critical-current density (3.9 × 105 A/cm2) at 77.3 K and 0 T were measured for the film deposited a 850°C. This film consisted of mostly c-axis oriented grains with a few a-axis oriented grains.

Original languageEnglish
Pages (from-to)860-866
Number of pages7
JournalJournal of Crystal Growth
Volume98
Issue number4
DOIs
Publication statusPublished - 1989 Dec

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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