Effect of Coulomb collisions on low gas pressure plasmas

K. Nanbu, Takaaki Furubayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A recent trend in material processing plasmas is the use of a low gas pressure and high plasma density. In such plasmas, Coulomb collisions among charged particles has been considered to have a significant effect on plasma structure. By use of Bobylev and Nanbu's theory [Phy. Rev. E, 61(2000), 4576], this effect on argon plasmas and oxygen plasmas generated by a capacitive discharge is examined. It is found that the effect is appreciable only for oxygen plasmas.

Original languageEnglish
Title of host publicationFLOW DYNAMICS
Subtitle of host publicationThe Second International Conference on Flow Dynamics
Pages582-585
Number of pages4
DOIs
Publication statusPublished - 2006 May 5
EventFLOW DYNAMICS: The Second International Conference on Flow Dynamics - Sendai, Japan
Duration: 2005 Nov 162005 Nov 18

Publication series

NameAIP Conference Proceedings
Volume832
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherFLOW DYNAMICS: The Second International Conference on Flow Dynamics
CountryJapan
CitySendai
Period05/11/1605/11/18

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Nanbu, K., & Furubayashi, T. (2006). Effect of Coulomb collisions on low gas pressure plasmas. In FLOW DYNAMICS: The Second International Conference on Flow Dynamics (pp. 582-585). (AIP Conference Proceedings; Vol. 832). https://doi.org/10.1063/1.2204570