Effect of configuration on microdischarge structure in a narrow channel

Lizhu Tong, Shigeru Yonemura, Hidemasa Takana, Hideya Nishiyama

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The effect of channel diameter on SiH4 microdischarge in a narrow channel is studied by performing the Particle-in-Cell/Monte Carlo (PIC/MC) simulation. It is shown that the inner surface of the channel, on which electric charges are accumulated, plays a role of virtual electrode. A sheath is formed on the inner surface of the channel. The plasma density increases when the channel diameter is decreased. The minimum value of the applied voltages required to sustain the stable glow discharges decreases with decreasing channel diameter. The reason of these effects is clearly explained.

Original languageEnglish
Pages (from-to)140-144
Number of pages5
JournalPhysics Letters, Section A: General, Atomic and Solid State Physics
Volume371
Issue number1-2
DOIs
Publication statusPublished - 2007 Nov 5

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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