Effect of bottom electrodes on microstructures and electrical properties of sol-gel derived Pb(Zr0.53 Ti0.47)O3 thin films

Zhan Jie Wang, Jia Ru Chu, Ryotaro Maeda, Hiroyuki Kokawa

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45 Citations (Scopus)


Lead zirconate titanate (PZT) thin films were fabricated by adding 15 mol.% excess of Pb to the starting solution and spin coating onto Pt/Ti/SiO2/Si and Ir/IrO2/SiO2/Si substrates. The effect of bottom electrodes on the microstructures, crystalline phases and electrical properties of the PZT thin films was investigated. It was found that the films deposited on Pt/Ti bottom electrode consisted of perovskite phase without pyrochlore phase, whereas the films deposited on the Ir/IrO2 bottom electrode consisted of mainly perovskite phase with a small amount of pyrochlore phase. Bottom electrodes were also found to influence the preferred orientation and microstructure as well as the surface morphology of the PZT films. The Pt/Ti bottom electrode favored a (100) orientation and fine-grained structure as well as a smooth surface, whereas the Ir/IrO2 bottom electrode favored a random orientation, non-uniform structure and rough surface. High-resolution electron microscopy observation reveals that there is an intermediate layer of IrO2 at the PZT/Ir interface. This indicates that the intermediate layer of IrO2 influenced the orientation and microstructure of the PZT films on the Ir/IrO2 bottom electrode. Ferroelectricity was investigated by observing the polarization hysteresis loops. The remanent polarization and saturation polarization of the PZT films on the Ir/IrO2 bottom electrode were smaller than those of the PZT films on the Pt/Ti bottom electrode. The difference between the dielectric and the ferroelectric properties in these PZT films was correlated to their crystalline phases and microstructure.

Original languageEnglish
Pages (from-to)66-71
Number of pages6
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 2002 Sep 2


  • Crystallization
  • Electron microscopy
  • Ferroelectric properties
  • Interface

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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