Abstract
Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.
Original language | English |
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Pages (from-to) | 564-569 |
Number of pages | 6 |
Journal | Physica E: Low-Dimensional Systems and Nanostructures |
Volume | 29 |
Issue number | 3-4 |
DOIs | |
Publication status | Published - 2005 Nov 1 |
Keywords
- Accelerating voltage
- Crystallization
- Electron-beam-induced deposition
- Nanodendrite
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics