Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

    Research output: Contribution to journalArticlepeer-review

    15 Citations (Scopus)

    Abstract

    Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.

    Original languageEnglish
    Pages (from-to)564-569
    Number of pages6
    JournalPhysica E: Low-Dimensional Systems and Nanostructures
    Volume29
    Issue number3-4
    DOIs
    Publication statusPublished - 2005 Nov 1

    Keywords

    • Accelerating voltage
    • Crystallization
    • Electron-beam-induced deposition
    • Nanodendrite

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Condensed Matter Physics

    Fingerprint

    Dive into the research topics of 'Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO<sub>2</sub> substrate with electron-beam-induced deposition'. Together they form a unique fingerprint.

    Cite this