Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition

Guoqiang Xie; Minghui Song; Kazutaka Mitsuishi; Kazuo Furuya

doi:10.1016/j.physe.2005.06.028

Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO₂ substrate with electron-beam-induced deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Self-standing W-nanodendrite structures were grown on SiO₂ substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.

Original language	English
Pages (from-to)	564-569
Number of pages	6
Journal	Physica E: Low-Dimensional Systems and Nanostructures
Volume	29
Issue number	3-4
DOIs	https://doi.org/10.1016/j.physe.2005.06.028
Publication status	Published - 2005 Nov 1

Keywords

Accelerating voltage
Crystallization
Electron-beam-induced deposition
Nanodendrite

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics

Access to Document

10.1016/j.physe.2005.06.028

Cite this

Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO₂ substrate with electron-beam-induced deposition. / Xie, Guoqiang; Song, Minghui; Mitsuishi, Kazutaka; Furuya, Kazuo.

In: Physica E: Low-Dimensional Systems and Nanostructures, Vol. 29, No. 3-4, 01.11.2005, p. 564-569.

Research output: Contribution to journal › Article › peer-review

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