TY - GEN
T1 - Effect of a photo-crosslinkable chemisorbed monolayer on thermal nanoimprinting of a poly(styrene) thin film on a gold substrate
AU - Oda, Hirokazu
AU - Ohtake, Tomoyuki
AU - Takaoka, Toshiaki
AU - Nakagawa, Masaru
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Figure 1 shows SEM images of a poly(styrene) thin film on a gold substrate after thermal nanoimprinting. When a bare gold substrate without a monolayer was used, most of a patterned PSt layer adhered to a silicon mold modified with a fluoro-containing stripper as shown in Figure 1a. Similar results were obtained in the case of a gold substrate with the photo-crosslinkable chemisorbed monolayer as shown in Figure lb. When the PSt layer on a gold substrate with the photo-crosslinkable chemisorbed monolayer was irradiated with a ultraviolet light at 365 nm before thermal nanoimprinting, interestingly adhesion of patterned PSt layers to a silicon mold was suppressed as shown in Figure 1c. These results clearly suggested that a photo-crosslinking reaction of the benzophenone moiety with PSt proceeded, which strengthened adhesion of a PSt layer to a gold substrate surface.
AB - Figure 1 shows SEM images of a poly(styrene) thin film on a gold substrate after thermal nanoimprinting. When a bare gold substrate without a monolayer was used, most of a patterned PSt layer adhered to a silicon mold modified with a fluoro-containing stripper as shown in Figure 1a. Similar results were obtained in the case of a gold substrate with the photo-crosslinkable chemisorbed monolayer as shown in Figure lb. When the PSt layer on a gold substrate with the photo-crosslinkable chemisorbed monolayer was irradiated with a ultraviolet light at 365 nm before thermal nanoimprinting, interestingly adhesion of patterned PSt layers to a silicon mold was suppressed as shown in Figure 1c. These results clearly suggested that a photo-crosslinking reaction of the benzophenone moiety with PSt proceeded, which strengthened adhesion of a PSt layer to a gold substrate surface.
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U2 - 10.1109/IMNC.2007.4456227
DO - 10.1109/IMNC.2007.4456227
M3 - Conference contribution
AN - SCOPUS:47349090746
SN - 4990247248
SN - 9784990247249
T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
SP - 308
EP - 309
BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Y2 - 5 November 2007 through 8 November 2007
ER -