Effect of a photo-crosslinkable chemisorbed monolayer on thermal nanoimprinting of a poly(styrene) thin film on a gold substrate

Hirokazu Oda, Tomoyuki Ohtake, Toshiaki Takaoka, Masaru Nakagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Figure 1 shows SEM images of a poly(styrene) thin film on a gold substrate after thermal nanoimprinting. When a bare gold substrate without a monolayer was used, most of a patterned PSt layer adhered to a silicon mold modified with a fluoro-containing stripper as shown in Figure 1a. Similar results were obtained in the case of a gold substrate with the photo-crosslinkable chemisorbed monolayer as shown in Figure lb. When the PSt layer on a gold substrate with the photo-crosslinkable chemisorbed monolayer was irradiated with a ultraviolet light at 365 nm before thermal nanoimprinting, interestingly adhesion of patterned PSt layers to a silicon mold was suppressed as shown in Figure 1c. These results clearly suggested that a photo-crosslinking reaction of the benzophenone moiety with PSt proceeded, which strengthened adhesion of a PSt layer to a gold substrate surface.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages308-309
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Oda, H., Ohtake, T., Takaoka, T., & Nakagawa, M. (2007). Effect of a photo-crosslinkable chemisorbed monolayer on thermal nanoimprinting of a poly(styrene) thin film on a gold substrate. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 308-309). [4456227] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456227